(CHLOROFLUOROALKYL)-2-PROPEONATES AND METHOD OF THEIR PREPARATION

(Chlorofluoroalkyl)-2-propenoates of general formula CH2=CX-COO-CH2-R, where X is hydrogen or methyl, R is chlorodifluoromethyl, chlorotetrafluoroethyl, 1,1-dichlorotrifluoroethyl, 1,2-dichlorotrifluoroethyl, trichlorodifluoroethyl, chlorotrifluoroethyl and dichlorodifluoroethyl, are used for preparation of polymers that find their application in microelectronic as electron and radiation resists. Their preparation method consists in the fact that they are prepared by reaction of 2-propenoylchlorides with R-CH2OH chlorofluoroalkanoles, where R is of the above-mentioned meaning. The reaction proceeds without any solvent or in the environment of solvents, while it is possible to use tertiary amine as another component of the reaction environment. The solvents that can be used are hydrocarbons and aliphatic ethers, which are characteristic by the boiling temperature ranging from -10 to 150 degrees C. Trialkylamines, N,N-dialkylcyclohexylamines, N,N-dialkylanilines, pyridine and its methyl- and ethyl derivatives up to the number of three alkyls in the molecule can be used as tertiary amines.