DEVICE FOR LATCHES OPENING

Chem-mech polishing slurry comprises: abrasive particles; a transition metal chelated salt (I); and a solvent. (I) is pref. an Fe, Co or Ni salt, esp. ammonium-Fe EDTA. A passivating agent is pref. also included, pref. a phosphate esp. dil. H3PO4 or (NH4)3PO4.

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Bibliographische Detailangaben
Hauptverfasser: TRNKA JAN,CS, KABATEK JAN,CS, KLUMPAR KAREL,CS, SESTAK JAN,CS, CHLADEK OTOKAR ,CS, KRULOVA JARMILA,CS, FIKRLE JAN,CS, PIALEK JOSEF,CS, UHLIROVA JARMILA,CS, SALOMOUN VLADIMIR,CS
Format: Patent
Sprache:eng
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Zusammenfassung:Chem-mech polishing slurry comprises: abrasive particles; a transition metal chelated salt (I); and a solvent. (I) is pref. an Fe, Co or Ni salt, esp. ammonium-Fe EDTA. A passivating agent is pref. also included, pref. a phosphate esp. dil. H3PO4 or (NH4)3PO4.