CMOS CONSTANT TEMPERATURE INTEGRATION FLUID SENSOR

The utility model discloses a CMOS constant temperature integration fluid sensor. The CMOS constant temperature integration fluid sensor adopts an NMOS transistor as a temperature-sensitive element and all adopts MOS elements in the whole chip, the CMOS constant temperature integration fluid sensor...

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Bibliographische Detailangaben
Hauptverfasser:	TONG QINYI, HUANG JINBIAO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	The utility model discloses a CMOS constant temperature integration fluid sensor. The CMOS constant temperature integration fluid sensor adopts an NMOS transistor as a temperature-sensitive element and all adopts MOS elements in the whole chip, the CMOS constant temperature integration fluid sensor realizes monolithic integration of the temperature-sensitive element, an operational amplifier and a heating element in the normal CMOS silicon grind planar technology, and the CMOS constant temperature integration fluid works adopting a single 5V power supply and a CMOS operational amplifier with high sensitivity to control the temperature of the chip constant. The CMOS constant temperature integration fluid sensor can be used for the measurement of various gases and liquids, the flow speed measurement, the real-time control of production technology for an integrated circuit and other measurement (such as the vacuum).