Combiner of remote plasma reactor

The utility model relates to a combiner of remote plasma reactors, which is suitable for base material settling chambers. The utility model is provided with at least two remote plasma reactors, a branch pipe, a mine pipeline and a plurality of branch pipelines, wherein each remote plasma reactor is...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	WILLIAM N. STERLING,ROBBIN TYLENOL
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The utility model relates to a combiner of remote plasma reactors, which is suitable for base material settling chambers. The utility model is provided with at least two remote plasma reactors, a branch pipe, a mine pipeline and a plurality of branch pipelines, wherein each remote plasma reactor is used for producing clean air flows, and is provided with a discharge port for discharging the cleaning air flows of a main guide pipe; the branch pipe is provided with a plurality of inlets and an outlet, wherein an inner passage is formed in the branch pipe, and the inlets are communicated with the outlet; the main pipeline is provided with a first end connected to the outlet of the branch pipe and a second end connected to the base material settling chamber; the branch pipelines are respectively provided with a first end connected to the discharge port of each remote plasma reactor and a second end connected to one inlet of the branch pipe.