Ion source outlet device capable of being adjusted in X direction

The utility model relates to an ion source drawing-off device with adjustable X direction, which is fixed on an ion source tee by flanges. A feed screw nut pair (12) is fixed after penetrating through the center of a gear transmission pair (14) which is in contact with a rotating shaft of a DC machi...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HUIYUE,GUO LONG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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