Ion source outlet device capable of being adjusted in X direction
The utility model relates to an ion source drawing-off device with adjustable X direction, which is fixed on an ion source tee by flanges. A feed screw nut pair (12) is fixed after penetrating through the center of a gear transmission pair (14) which is in contact with a rotating shaft of a DC machi...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The utility model relates to an ion source drawing-off device with adjustable X direction, which is fixed on an ion source tee by flanges. A feed screw nut pair (12) is fixed after penetrating through the center of a gear transmission pair (14) which is in contact with a rotating shaft of a DC machine (1), so that the rotation of the DC machine (1) can drive the gear transmission pair (14) to rotate, and the feed screw nut pair (12) is driven to produce horizontal displacement. The feed screw nut pair (12) can drive a base (10) which is in contact with the feed screw nut pair (12) to produce horizontal displacement, and a connecting shaft (6) which is fixed in the center of the base (10) drives an electrode (7) that is installed at the other end of the connecting shaft (6) to move; the other end of the feed screw nut pair (12) is connected with a potentiometer (16) through a shaft connector (15), the horizontal displacement produced by the feed screw nut pair (12) can change the resistance of the potentiometer (16), and the steering of the DC machine (1) is adjusted after the resistance variation is detected and processed by a computer, so that the adjustable movement of the electrode (7) in the X direction is achieved, and the centering error of the ion source drawing-off device is eliminated. |
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