Nano-class pattern impression device

The utility model relates to a nanometer rank pattern impression device which is characterized in that the utility model comprises a pressure control component, a movement guarantee controllable component, a temperature control component and an adsorption component, wherein the pressure control comp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WENQI GU, WEIHUA SI, XIAOWEN DONG
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model relates to a nanometer rank pattern impression device which is characterized in that the utility model comprises a pressure control component, a movement guarantee controllable component, a temperature control component and an adsorption component, wherein the pressure control component is positioned at the middle upper part of a pressure guide circular cylinder [7] which is arranged on a rack supporting plate [6]; the movement guarantee control component is arranged at the lower part of the pressure guide circular cylinder [7] by a spline guide circular cylinder [13]; an upper vacuum chuck [17] of the adsorption component is connected with a spline guide bar [14] of the movement guarantee controllable component; a lower vacuum chuck [18] is connected with a supporting plate [10] on a base seat of a rack; the temperature control component is positioned below the lower vacuum chuck [18] of the adsorption component, wherein the upper surface of a heating device [19] is closely contacted with the lower surface of the lower vacuum chuck [18]. The utility model has the advantages of low equipment cost, reliability, practicality and convenient operation.