Metal ion implanter

The utility model discloses a metal ion implanter in order to provide a metal ion implanter with strong ion beam, low beam leading voltage, large implanting area, short implanting time and low processing cost. A metal ion source 1 of the utility model comprises a negative pole 5, a negative support...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JIUMEI WU, WEIZHOU YE, ENFA CAI, JIANJIANG CAI, XIANHUA SHAO, GUANMIAN WU, SHANMING MA, SHIHUI TAO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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