High-precise angle displacement measurer based on F-P plate sine phase modulation
The utility model relates to a high precise angle displacement measurement device based on the F-P plate sinusoidal phase modulation, comprising a modulated light source with a driving power; an autocollimator objective and reflector positioned along the advancing direction of the light beam emit fr...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The utility model relates to a high precise angle displacement measurement device based on the F-P plate sinusoidal phase modulation, comprising a modulated light source with a driving power; an autocollimator objective and reflector positioned along the advancing direction of the light beam emit from the modulated light source; a measuring object is positioned along the advancing direction of the light beam reflected by the reflection mirror; a F-P plate and a beam splitter positioned along the advancing direction of the measuring object reflection light; a lens and photo-electric conversion components are positioned along the transmission light beam direction at the end port (b) on the beam splitter; the photo-electric conversion component is connected with an A/D conversion unit of the computer; a CCD image detector is positioned along the reflection light beam direction at the end port (c) on the beam splitter and is connected with the A/D conversion unit of the computer. |
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