Shunt structure for mass flow controller

The utility model relates to a flow splitting structure for a mass flow controller, which comprises an outer pipe, an inner cylinder, and a plurality of interval elements, wherein, the inner cylinder is arranged in the outer pipe and is fixed by a plurality of interval elements; annular interstices...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JINGQING WU, CHENDE CAI, JIANXING LI
Format:	Patent
Sprache:	eng
Schlagworte:	CONTROLLING PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
Online-Zugang:	Volltext bestellen
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