Shunt structure for mass flow controller

The utility model relates to a flow splitting structure for a mass flow controller, which comprises an outer pipe, an inner cylinder, and a plurality of interval elements, wherein, the inner cylinder is arranged in the outer pipe and is fixed by a plurality of interval elements; annular interstices...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JINGQING WU, CHENDE CAI, JIANXING LI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The utility model relates to a flow splitting structure for a mass flow controller, which comprises an outer pipe, an inner cylinder, and a plurality of interval elements, wherein, the inner cylinder is arranged in the outer pipe and is fixed by a plurality of interval elements; annular interstices used for fluid to pass through are generated between the inner cylinder and the interval elements. The length of the interval elements is equal to the length of the outer pipe and the inner cylinder, and the cross sections of the interstices are kept same; the outer pipe, the inner cylinder, and the interval elements adopt anticorrosion materials, and the boundary condition received by the fluid passing through the annular interstice is homogeneous and coincident. The width of the annular interstice causes the fluid passing through to keep laminar flow; the proportion of the flow rate of a branch passage and the flow rate of a main passage is kept a definite value.