Flexible-winding film-plating machine

The utility model relates to a flexible-winding film-plating machine, which is composed of a winding chamber, a film-plating chamber and an auxiliary device, wherein in the film-plating chamber, a plurality of magnetic-controlled sputtering targets are installed around a cooling roller. An isolation...

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Bibliographische Detailangaben
Hauptverfasser:	CHUANCAI PENG, ZHIGANG CAO, GUANGLIAN HUANG
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model relates to a flexible-winding film-plating machine, which is composed of a winding chamber, a film-plating chamber and an auxiliary device, wherein in the film-plating chamber, a plurality of magnetic-controlled sputtering targets are installed around a cooling roller. An isolation trench is installed between two targets, and the isolation trench is communicated with an air extractor. The distance between the isolation trench and the cooling roller is less than 10 mm, and each target is provided with an independent air-distributing pipe. The utility model realizes the continuous plating of the low-radiation film on the flexible material.