Micro-array three-dimensional parallel confocal testing apparatus

The utility model relates to a micro-array three-dimensional parallel confocal testing apparatus, which is composed of a light source, a small hole diaphragm, a collimating lens, a glimmer array synthesizer, a half inverse semitransparent lens, an objective lens on the same central optical shaft. Th...

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Bibliographische Detailangaben

Hauptverfasser:	LURONG GUO, WEIJIAN TIAN, BO CHEN
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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