Micro-array three-dimensional parallel confocal testing apparatus

The utility model relates to a micro-array three-dimensional parallel confocal testing apparatus, which is composed of a light source, a small hole diaphragm, a collimating lens, a glimmer array synthesizer, a half inverse semitransparent lens, an objective lens on the same central optical shaft. The half inverse semitransparent mirror has an inclined angle with 45 DEG, and the planes of rest components are parallel with each other and are vertical to the central optical shaft. A plane of a CCD area array is parallel to the central optical axis, and a receiving surface thereof faces against the reflection surface of the half inverse semitransparent lens. The device can carry out the accurate detection for a three-dimensional surface of a dynamic system and have the advantages of less error, simple structure., easy fabrication, convenient operation, and low cost.