Cable fixing structure for film forming equipment and film forming equipment

The utility model discloses a cable fixing structure and film forming equipment. The cable fixing structure comprises multiple pairs of fixing metal plates, a first fixing metal plate assembly in each pair of fixing metal plates is located at the external support end of the film forming equipment, a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DONG LANXIN, SUN SHAODONG, YANG XUE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a cable fixing structure and film forming equipment. The cable fixing structure comprises multiple pairs of fixing metal plates, a first fixing metal plate assembly in each pair of fixing metal plates is located at the external support end of the film forming equipment, and a second fixing metal plate assembly in each pair of fixing metal plates is located at the cavity cover end of the film forming equipment; the drag chain set comprises a plurality of drag chains, the interiors of the drag chains are used for containing power supply cables, the two ends of each drag chain are fixed to the external support end and the cavity cover end through the first fixed metal plate assembly and the second fixed metal plate assembly respectively, and a plurality of drag chain sections are reversely installed at the preset position, close to the cavity cover end, of each drag chain; the supporting drag chain is bent in an S shape between the outer support end and the cavity cover end. According