Vacuum cavity for semiconductor equipment

The utility model discloses a vacuum cavity for semiconductor equipment, which comprises a cover plate arranged above a cavity main body, two sides of the cover plate are respectively provided with a connecting block, a first electric push rod is arranged below each connecting block, a sealing ring is arranged between the cover plate and the cavity main body, and a second electric push rod is arranged below each connecting block. A vacuum pump and a pressure gauge are arranged above the cover plate, and a touch screen is arranged on one side of the cavity main body; the mounting plate is arranged in the cavity main body, a sliding groove is formed in the upper end of the mounting plate, two clamping plates are arranged above the mounting plate, one end of each clamping plate extends into the sliding groove, the clamping plates and the mounting plate are slidably connected with the clamping plates, and supporting legs are arranged below the cavity main body. The vacuum cavity is provided with the pressure dete