Faraday cup capable of preventing sputtering beam pollution

The utility model discloses an anti-sputtering beam pollution Faraday cylinder, which comprises a shielding cylinder, supporting columns are uniformly arranged in the shielding cylinder, collecting electrodes are arranged in the supporting columns, connecting plates are uniformly arranged on the two...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI XUHUI, LI JING, HUA YONGPING
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model discloses an anti-sputtering beam pollution Faraday cylinder, which comprises a shielding cylinder, supporting columns are uniformly arranged in the shielding cylinder, collecting electrodes are arranged in the supporting columns, connecting plates are uniformly arranged on the two sides of the collecting electrodes, connecting blocks are arranged at the bottom ends of the connecting plates, and the connecting blocks are connected with the shielding cylinder. And connecting grooves are formed in the supporting columns correspondingly, and the connecting grooves are connected with the connecting blocks correspondingly. Through the directional sliding groove and the directional sliding block, guiding connection with a bias electrode and a collecting electrode is facilitated, then through positioning connection of the limiting block and the limiting hole, the connection mode is simpler, positioning installation of the collecting electrode is achieved through cooperation of the inserting block a