Plasma resistant surface structure
The utility model relates to a plasma-resistant surface structure, which is arranged on the surface of a substrate and comprises a plasma-resistant layer formed by a method for forming the plasma-resistant layer. The method for forming the plasma corrosion resistant layer comprises the following ste...
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| creator | HUANG BAIJIA WU ZONGFENG LIN JIADE QIU GUOYANG LIAO JUNZHI CHEN BAIHAN |
| description | The utility model relates to a plasma-resistant surface structure, which is arranged on the surface of a substrate and comprises a plasma-resistant layer formed by a method for forming the plasma-resistant layer. The method for forming the plasma corrosion resistant layer comprises the following steps of: placing an ingot-shaped target material in a target groove of an electron gun evaporator, bombarding the ingot-shaped target material by electron beams emitted by the electron gun evaporator, vaporizing the ingot-shaped target material and depositing the plasma corrosion resistant layer on the surface of a base material. And the plasma-resistant surface structure is provided with a high-quality plasma corrosion-resistant layer.
一种耐电浆表面结构，该耐电浆表面结构设置于基材表面，包括经由一种形成耐电浆腐蚀层的方法而形成的一耐电浆腐蚀层。所述形成耐电浆腐蚀层的方法包括以下步骤：将一锭状靶材置于一电子枪蒸镀机之一靶槽内，并以该电子枪蒸镀机所发出的电子束轰击该锭状靶材，将其汽化并沉积一耐电浆腐蚀层于一基材之表面上。耐电浆表面结构具有高质量之耐电浆腐蚀层。 |
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一种耐电浆表面结构，该耐电浆表面结构设置于基材表面，包括经由一种形成耐电浆腐蚀层的方法而形成的一耐电浆腐蚀层。所述形成耐电浆腐蚀层的方法包括以下步骤：将一锭状靶材置于一电子枪蒸镀机之一靶槽内，并以该电子枪蒸镀机所发出的电子束轰击该锭状靶材，将其汽化并沉积一耐电浆腐蚀层于一基材之表面上。耐电浆表面结构具有高质量之耐电浆腐蚀层。</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240913&DB=EPODOC&CC=CN&NR=221701622U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25569,76552</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240913&DB=EPODOC&CC=CN&NR=221701622U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HUANG BAIJIA</creatorcontrib><creatorcontrib>WU ZONGFENG</creatorcontrib><creatorcontrib>LIN JIADE</creatorcontrib><creatorcontrib>QIU GUOYANG</creatorcontrib><creatorcontrib>LIAO JUNZHI</creatorcontrib><creatorcontrib>CHEN BAIHAN</creatorcontrib><title>Plasma resistant surface structure</title><description>The utility model relates to a plasma-resistant surface structure, which is arranged on the surface of a substrate and comprises a plasma-resistant layer formed by a method for forming the plasma-resistant layer. The method for forming the plasma corrosion resistant layer comprises the following steps of: placing an ingot-shaped target material in a target groove of an electron gun evaporator, bombarding the ingot-shaped target material by electron beams emitted by the electron gun evaporator, vaporizing the ingot-shaped target material and depositing the plasma corrosion resistant layer on the surface of a base material. And the plasma-resistant surface structure is provided with a high-quality plasma corrosion-resistant layer.
一种耐电浆表面结构，该耐电浆表面结构设置于基材表面，包括经由一种形成耐电浆腐蚀层的方法而形成的一耐电浆腐蚀层。所述形成耐电浆腐蚀层的方法包括以下步骤：将一锭状靶材置于一电子枪蒸镀机之一靶槽内，并以该电子枪蒸镀机所发出的电子束轰击该锭状靶材，将其汽化并沉积一耐电浆腐蚀层于一基材之表面上。耐电浆表面结构具有高质量之耐电浆腐蚀层。</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFAKyEkszk1UKEotziwuScwrUSguLUpLTE5VKC4pKk0uKS1K5WFgTUvMKU7lhdLcDEpuriHOHrqpBfnxqcUFQMV5qSXxzn5GRobmBoZmRkahocZEKQIAMfcnQA</recordid><startdate>20240913</startdate><enddate>20240913</enddate><creator>HUANG BAIJIA</creator><creator>WU ZONGFENG</creator><creator>LIN JIADE</creator><creator>QIU GUOYANG</creator><creator>LIAO JUNZHI</creator><creator>CHEN BAIHAN</creator><scope>EVB</scope></search><sort><creationdate>20240913</creationdate><title>Plasma resistant surface structure</title><author>HUANG BAIJIA ; WU ZONGFENG ; LIN JIADE ; QIU GUOYANG ; LIAO JUNZHI ; CHEN BAIHAN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN221701622UU3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2024</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>HUANG BAIJIA</creatorcontrib><creatorcontrib>WU ZONGFENG</creatorcontrib><creatorcontrib>LIN JIADE</creatorcontrib><creatorcontrib>QIU GUOYANG</creatorcontrib><creatorcontrib>LIAO JUNZHI</creatorcontrib><creatorcontrib>CHEN BAIHAN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HUANG BAIJIA</au><au>WU ZONGFENG</au><au>LIN JIADE</au><au>QIU GUOYANG</au><au>LIAO JUNZHI</au><au>CHEN BAIHAN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Plasma resistant surface structure</title><date>2024-09-13</date><risdate>2024</risdate><abstract>The utility model relates to a plasma-resistant surface structure, which is arranged on the surface of a substrate and comprises a plasma-resistant layer formed by a method for forming the plasma-resistant layer. The method for forming the plasma corrosion resistant layer comprises the following steps of: placing an ingot-shaped target material in a target groove of an electron gun evaporator, bombarding the ingot-shaped target material by electron beams emitted by the electron gun evaporator, vaporizing the ingot-shaped target material and depositing the plasma corrosion resistant layer on the surface of a base material. And the plasma-resistant surface structure is provided with a high-quality plasma corrosion-resistant layer.
一种耐电浆表面结构，该耐电浆表面结构设置于基材表面，包括经由一种形成耐电浆腐蚀层的方法而形成的一耐电浆腐蚀层。所述形成耐电浆腐蚀层的方法包括以下步骤：将一锭状靶材置于一电子枪蒸镀机之一靶槽内，并以该电子枪蒸镀机所发出的电子束轰击该锭状靶材，将其汽化并沉积一耐电浆腐蚀层于一基材之表面上。耐电浆表面结构具有高质量之耐电浆腐蚀层。</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Plasma resistant surface structure |
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