Plasma resistant surface structure

The utility model relates to a plasma-resistant surface structure, which is arranged on the surface of a substrate and comprises a plasma-resistant layer formed by a method for forming the plasma-resistant layer. The method for forming the plasma corrosion resistant layer comprises the following steps of: placing an ingot-shaped target material in a target groove of an electron gun evaporator, bombarding the ingot-shaped target material by electron beams emitted by the electron gun evaporator, vaporizing the ingot-shaped target material and depositing the plasma corrosion resistant layer on the surface of a base material. And the plasma-resistant surface structure is provided with a high-quality plasma corrosion-resistant layer. 一种耐电浆表面结构，该耐电浆表面结构设置于基材表面，包括经由一种形成耐电浆腐蚀层的方法而形成的一耐电浆腐蚀层。所述形成耐电浆腐蚀层的方法包括以下步骤：将一锭状靶材置于一电子枪蒸镀机之一靶槽内，并以该电子枪蒸镀机所发出的电子束轰击该锭状靶材，将其汽化并沉积一耐电浆腐蚀层于一基材之表面上。耐电浆表面结构具有高质量之耐电浆腐蚀层。