Integrated gas circuit structure of vacuum attenuation method tester
The utility model provides an integrated gas circuit structure of a vacuum attenuation method tester, which comprises a vacuum pump, a detection cavity for placing a sample to be detected and a pressure difference transmitter, and further comprises a mounting bottom plate for mounting the detection...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides an integrated gas circuit structure of a vacuum attenuation method tester, which comprises a vacuum pump, a detection cavity for placing a sample to be detected and a pressure difference transmitter, and further comprises a mounting bottom plate for mounting the detection cavity and the pressure difference transmitter, a first gas circuit bottom plate and a second gas circuit bottom plate are arranged on the mounting bottom plate, and the first gas circuit bottom plate and the second gas circuit bottom plate are arranged on the mounting bottom plate. An air hole of the first air channel bottom plate is connected with the detection cavity, the pressure difference transmitter and the vacuum pump, a first electromagnetic valve and a second electromagnetic valve are arranged between the first air channel bottom plate and the second air channel bottom plate, the second air channel bottom plate is connected with the pressure difference transmitter through a pipeline, and a third electroma |
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