Device for removing methyl chlorosilane in hydrogenated raw material liquid by physical method

The utility model discloses a device for removing methyl chlorosilane in hydrogenated raw material liquid by using a physical method, which belongs to the technical field of polycrystalline silicon production and comprises a first rectifying tower, a second rectifying tower, a third rectifying tower...

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Bibliographische Detailangaben
Hauptverfasser: YANG DINGYONG, MA KEWU, PU YIJUN, LUO ZHOU, ZHANG XIAOQIANG, FENG BO, MING YONG, LI BIN, TANG YONG, HOU BIN, WANG FENG, YANG QING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a device for removing methyl chlorosilane in hydrogenated raw material liquid by using a physical method, which belongs to the technical field of polycrystalline silicon production and comprises a first rectifying tower, a second rectifying tower, a third rectifying tower, a fourth rectifying tower and a fifth rectifying tower, the first rectifying tower is connected with a hydrogenated liquid inlet pipe, and a first tower top outlet pipe is connected with the second rectifying tower; the first tower kettle outlet pipe is connected with a first rectifying tower, the second tower kettle outlet pipe is connected with a second rectifying tower, the third tower kettle outlet pipe is connected with a fourth rectifying tower, the fourth tower kettle outlet pipe is connected with a fifth rectifying tower, and each rectifying tower is provided with a tower top outlet pipe, a tower kettle outlet pipe, a reboiler and a condenser. And the concentration of thousands to tens of thousands of tim