Shaping auxiliary mechanism for anti-warping silicon wafer

The utility model discloses an anti-warping silicon wafer shaping auxiliary mechanism, which is positioned on two opposite sides of a quartz boat and comprises two auxiliary clamps which are symmetrically arranged, wherein each auxiliary clamp comprises two or more shaping modules and a connecting rod, the two or more shaping modules are provided with comb teeth aligned with tooth grooves of the quartz boat and are arranged in an aligned mode, the connecting rod is used for connecting the two or more shaping modules in series, and each shaping module can be movably and adjustably arranged in the length direction of the connecting rod. And the comb teeth on each shaping module can be used for equidistantly spacing a plurality of silicon wafers which are arranged side by side. According to the utility model, on one hand, through segmented and aligned shaping auxiliary clamping, the warping rate of a silicon wafer during processing is reduced, and the silicon wafer or a suction cup is prevented from being damage