Scanning galvanometer

The utility model relates to the technical field of laser processing devices, and discloses a scanning galvanometer, which comprises a base, a beam combiner assembly and a scanning galvanometer assembly, the beam combiner assembly and the scanning galvanometer assembly are connected to the base, the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANG RUIZHUO, YANG JIANFENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to the technical field of laser processing devices, and discloses a scanning galvanometer, which comprises a base, a beam combiner assembly and a scanning galvanometer assembly, the beam combiner assembly and the scanning galvanometer assembly are connected to the base, the base is provided with an assembly cavity, an incidence hole and a galvanometer exit hole, the incidence hole and the galvanometer exit hole are respectively communicated with the assembly cavity, and the beam combiner assembly and the scanning galvanometer assembly are connected with the assembly cavity. The beam combiner assembly comprises a point light source part and a beam combiner lens, the galvanometer assembly comprises a galvanometer driving part and a scanning lens, the scanning lens is in transmission connection with the galvanometer driving part, the scanning lens and the beam combiner lens are located in the assembly cavity, and the position of the scanning lens corresponds to the incidence hole and th