High-precision automatic gas distribution instrument
The utility model relates to a high-precision automatic gas distribution instrument, and relates to the technical field of gas distribution instruments, the gas distribution instrument comprises a cabinet, and a mixing assembly, a control assembly and a plurality of gas inlet assemblies are arranged...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to a high-precision automatic gas distribution instrument, and relates to the technical field of gas distribution instruments, the gas distribution instrument comprises a cabinet, and a mixing assembly, a control assembly and a plurality of gas inlet assemblies are arranged in the cabinet; the air inlet assembly comprises an air inlet pipeline, the mixing assembly comprises a mixing tank and an air outlet pipeline, one end of the air inlet pipeline is communicated with the mixing tank, the other end extends to the outer side of the cabinet, one end of the air outlet pipeline is communicated with the mixing tank, and the other end extends to the outer side of the cabinet; a mass flow controller and a stop valve are arranged on the air inlet pipeline; the control assembly comprises a logic controller, and the mass flow controller and the stop valve are electrically connected with the logic controller. The mass flow controller and the stop valve are controlled through the logic controll |
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