Flower basket feeding device and semiconductor process equipment

The utility model discloses a flower basket feeding device and semiconductor process equipment, and relates to the technical field of semiconductor processing, and the disclosed flower basket feeding device comprises a conveying mechanism, a feeding mechanism, a transfer mechanism and a flower basket storage area; the conveying mechanism comprises at least two conveying belts arranged at intervals, and the flower baskets are conveyed to the feeding mechanism through the conveying belts and fed through the feeding mechanism. The flower basket storage area is arranged between every two adjacent conveying belts, and the transfer mechanism and the conveying mechanism are oppositely arranged and can horizontally move in the two orthogonal directions in the conveying plane of the conveying belts relative to the conveying mechanism; the transfer mechanism is used for grabbing the flower baskets located on any conveyor belt and transferring the flower baskets to the flower basket storage area, or the transfer mechani