Defective piece removing equipment
The utility model provides a defective wafer rejecting device which comprises a bearing conveying device, a detection device and an adsorption conveying device, the bearing conveying device comprises a plurality of roll shafts which are arranged at intervals along the conveying direction of the bear...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a defective wafer rejecting device which comprises a bearing conveying device, a detection device and an adsorption conveying device, the bearing conveying device comprises a plurality of roll shafts which are arranged at intervals along the conveying direction of the bearing conveying device, and the roll shafts can bear at least two silicon wafers which are arranged along the axial direction of the roll shafts. At least part of the detection device is arranged above the bearing conveying device so as to detect at least two silicon wafers arranged in the axial direction of the roller shaft, the adsorption conveying device is located at the downstream of the bearing conveying device, and the height position of the adsorption conveying device is higher than that of the bearing conveying device so as to form a defective wafer outlet between the bearing conveying device and the adsorption conveying device. According to the defective wafer removing equipment, the silicon wafers are conv |
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