Vacuum control system and vacuum system

The utility model relates to the technical field of vacuum, and discloses a vacuum control system and a vacuum system. According to the vacuum control system, an air exhaust loop is set to be a vacuumizing loop, and the vacuumizing loop is provided with a vacuumizing pipeline; the voltage stabilizin...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: XU ZEHUA, ZHANG ZHIWEI, CHEN YUANMING, YOU ZHITENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The utility model relates to the technical field of vacuum, and discloses a vacuum control system and a vacuum system. According to the vacuum control system, an air exhaust loop is set to be a vacuumizing loop, and the vacuumizing loop is provided with a vacuumizing pipeline; the voltage stabilizing loop is connected with the vacuumizing loop; the vacuum breaking loop is connected with the vacuumizing loop; wherein the pressure stabilizing loop and the vacuum breaking loop share one loop system, and the loop system is set as an air inlet loop. The vacuum system comprises the vacuum control system and a vacuum chamber. Wherein the vacuum control system is connected with the vacuum chamber. According to the technical scheme, the current vacuum structure is simplified, the cost and the complexity of the pipeline are reduced, and the pipeline is efficiently utilized. Air inlet compensation of the pressure stabilizing loop and vacuum breaking of the vacuum breaking loop share the same pipeline system, complexity