Support plate structure and vacuum coating equipment
The utility model discloses a carrier plate structure and vacuum coating equipment, the carrier plate structure comprises a plate body, the plate body is provided with a bearing surface, the bearing surface is provided with at least two opposite correction pieces and a plurality of clamps, the plura...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a carrier plate structure and vacuum coating equipment, the carrier plate structure comprises a plate body, the plate body is provided with a bearing surface, the bearing surface is provided with at least two opposite correction pieces and a plurality of clamps, the plurality of clamps are distributed along the periphery of a glass substrate to clamp the edge of the glass substrate, and the correction pieces are arranged on the plate body. The correcting piece comprises a connecting shaft and an adjusting block rotationally arranged on the connecting shaft, the adjusting block is provided with an abutting face, the connecting shaft is provided with a first elastic piece, the first elastic piece is connected with the adjusting block, and the first elastic piece can drive the adjusting block to rotate relative to the connecting shaft so that the abutting face can be kept parallel to or perpendicular to the center line of the plate body in the first direction. When the clamp clamps th |
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