MEMS resonator

The embodiment of the utility model discloses an MEMS resonator, the MEMS resonator comprises a vibrating body, an outer electrode and an inner electrode, the vibrating body comprises a vibrating arm and a coupling beam; the outer electrodes comprise a first outer electrode, a second outer electrode...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHU CAIWEI, ZHU HUAIYUAN, LI MING, CHEAH KOK WAI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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