MEMS resonator

The embodiment of the utility model discloses an MEMS resonator, the MEMS resonator comprises a vibrating body, an outer electrode and an inner electrode, the vibrating body comprises a vibrating arm and a coupling beam; the outer electrodes comprise a first outer electrode, a second outer electrode, a third outer electrode and a fourth outer electrode, the first outer electrode and the second outer electrode are located at one end of the vibration arm, and the third outer electrode and the fourth outer electrode are located at the other end of the vibration arm; the inner electrode comprises a first inner electrode and a second inner electrode, and the first inner electrode and the second inner electrode are arranged on the two sides of the coupling beam respectively; wherein the first external electrode and the second external electrode are connected in series, and the third external electrode and the fourth external electrode are connected in series; according to the scheme, the rigidity of the electrodes