Deposition tool

The embodiment of the utility model provides a deposition tool. The deposition tool comprises a magnet assembly, a single cathode and a power supply circuit, wherein the power supply circuit is used for biasing a base for supporting a semiconductor substrate; during a deposition operation of deposit...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DAI YOUQUAN, LIN YANLIANG, HUANG YUKANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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