Dual multi-layer mixed inflation tank device of vacuum coating machine

The utility model discloses a double multi-layer mixed gas filling tank device of a vacuum coating machine, and relates to the technical field of gas filling system components of the vacuum coating machine. Comprising a mixed inflation tank device, one side of the mixed inflation tank device communi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHAO XIANKUN, GAO XIAOHUA, CHENG WEI, LIU YINGLIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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