Dual multi-layer mixed inflation tank device of vacuum coating machine
The utility model discloses a double multi-layer mixed gas filling tank device of a vacuum coating machine, and relates to the technical field of gas filling system components of the vacuum coating machine. Comprising a mixed inflation tank device, one side of the mixed inflation tank device communi...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a double multi-layer mixed gas filling tank device of a vacuum coating machine, and relates to the technical field of gas filling system components of the vacuum coating machine. Comprising a mixed inflation tank device, one side of the mixed inflation tank device communicates with a vacuum chamber, and the other side of the mixed inflation tank device communicates with a flow meter row; the mixed gas filling tank device comprises a gas inlet tank and a gas outlet tank, a mixing barrel is arranged in the gas inlet tank, and a plurality of through holes are formed in one side of the mixing barrel. Due to the fact that the through hole is formed in the side, far away from the gas inlet connector, of the mixing barrel, the mixing time of various gases in the gas inlet tank is effectively prolonged, the gases finally enter the mixing barrel, the mixing effect of the various gases in the gas outlet tank is further improved through the arrangement of the splitter plate, the gases are ful |
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