Energy-saving type cooling structure reduction furnace
The utility model discloses an energy-saving type reduction furnace with a cooling structure, which belongs to the technical field of polycrystalline silicon reduction furnaces and comprises a furnace barrel, the inner wall of the furnace barrel is an inner layer made of high-purity quartz materials...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses an energy-saving type reduction furnace with a cooling structure, which belongs to the technical field of polycrystalline silicon reduction furnaces and comprises a furnace barrel, the inner wall of the furnace barrel is an inner layer made of high-purity quartz materials, the outer side of the furnace barrel sequentially comprises a middle layer and a shell, and a heat insulation cavity layer filled with gas is arranged between the inner wall of the furnace barrel and the middle layer. A second cavity layer filled with a cooling fluid medium is arranged between the middle layer and the shell, a gas inlet communicated with the heat insulation cavity layer and a fluid inlet communicated with the second cavity layer are formed in the lower portion of the furnace barrel, and a gas outlet communicated with the heat insulation cavity layer and a fluid outlet communicated with the second cavity layer are formed in the upper portion of the furnace barrel; the novel energy-saving type cool |
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