Connecting device

Connecting device

The utility model provides a connecting device, which is used for connecting a transmission module and a process module in a wafer processing system, and comprises a connecting main body and a plugging mechanism, a conveying channel is formed in the connecting main body, and the conveying channel is...

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Hauptverfasser: ZENG PEIQIN, WANG XIANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator ZENG PEIQIN
WANG XIANG
description The utility model provides a connecting device, which is used for connecting a transmission module and a process module in a wafer processing system, and comprises a connecting main body and a plugging mechanism, a conveying channel is formed in the connecting main body, and the conveying channel is used for communicating the transmission module with the process module; the blocking mechanism is detachably connected with the connecting main body, and the blocking mechanism is used for closing or opening the conveying channel. In the embodiment of the invention, the transmission module and the process module are connected by using the connecting main body, and the blocking mechanism is arranged on the connecting main body, so that the function switching of communication or closing between the transmission module and the process module is realized, the installation and maintenance of the blocking mechanism are facilitated, and the cost is reduced. Besides, the connecting device is additionally arranged between
format Patent
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In the embodiment of the invention, the transmission module and the process module are connected by using the connecting main body, and the blocking mechanism is arranged on the connecting main body, so that the function switching of communication or closing between the transmission module and the process module is realized, the installation and maintenance of the blocking mechanism are facilitated, and the cost is reduced. 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In the embodiment of the invention, the transmission module and the process module are connected by using the connecting main body, and the blocking mechanism is arranged on the connecting main body, so that the function switching of communication or closing between the transmission module and the process module is realized, the installation and maintenance of the blocking mechanism are facilitated, and the cost is reduced. Besides, the connecting device is additionally arranged between</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Connecting device
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