Connecting device
The utility model provides a connecting device, which is used for connecting a transmission module and a process module in a wafer processing system, and comprises a connecting main body and a plugging mechanism, a conveying channel is formed in the connecting main body, and the conveying channel is...
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| Hauptverfasser: | , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The utility model provides a connecting device, which is used for connecting a transmission module and a process module in a wafer processing system, and comprises a connecting main body and a plugging mechanism, a conveying channel is formed in the connecting main body, and the conveying channel is used for communicating the transmission module with the process module; the blocking mechanism is detachably connected with the connecting main body, and the blocking mechanism is used for closing or opening the conveying channel. In the embodiment of the invention, the transmission module and the process module are connected by using the connecting main body, and the blocking mechanism is arranged on the connecting main body, so that the function switching of communication or closing between the transmission module and the process module is realized, the installation and maintenance of the blocking mechanism are facilitated, and the cost is reduced. Besides, the connecting device is additionally arranged between |
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