Pressure sensor leakage testing device
A pressure sensor leakage testing device disclosed by the utility model comprises a helium pipeline, a vacuum pipeline and leakage detection equipment, one end of the helium pipeline is arranged on a helium source, the other end of the helium pipeline is communicated with the first pipeline, one end...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | A pressure sensor leakage testing device disclosed by the utility model comprises a helium pipeline, a vacuum pipeline and leakage detection equipment, one end of the helium pipeline is arranged on a helium source, the other end of the helium pipeline is communicated with the first pipeline, one end of the vacuum pipeline is provided with a vacuum pump, and the other end of the vacuum pipeline is communicated with the leakage detection equipment. The other end of the vacuum pipeline is communicated with the second pipeline, and a helium mass spectrum detector is further arranged on the vacuum pipeline. According to the invention, the leak detection device is connected with the helium pipeline and the vacuum pipeline, and the leak test is carried out on the pressure sensor through the vacuum pipeline and the helium pipeline, so that the loading time is shortened, and the loading efficiency is improved.
本实用新型公开的一种压力传感器泄漏测试装置，包括压力传感器泄漏测试装置包括氦气管道、真空管道和检漏设备，所述氦气管道一端设于氦气源上，所述氦气管道的另一端与所述第一管道相连通，所述真空管道一端设有真空泵，所述真空管道的 |
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