Probe card butt joint structure for wafer test

The utility model discloses a probe card butt joint structure for wafer testing, which belongs to the technical field of wafer testing and comprises a testing head and a wafer chuck, a wafer body is arranged on the wafer chuck, a butt joint mechanism is arranged at the bottom of the testing head, a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CHO KYU-DAE, SONG XIULIANG, PARK YOUNG DOO
Format: Patent
Sprache:chi ; eng
Schlagworte:
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