Storage cabinet for semiconductor processing
The utility model discloses a semiconductor processing storage cabinet which comprises a cabinet body, a cabinet door is hinged to the front face of the cabinet body, a plurality of placing frames are sequentially arranged in the cabinet body from top to bottom, the placing frames are made of water...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a semiconductor processing storage cabinet which comprises a cabinet body, a cabinet door is hinged to the front face of the cabinet body, a plurality of placing frames are sequentially arranged in the cabinet body from top to bottom, the placing frames are made of water bags, clean water is injected into the placing frames, a plurality of inserting grooves are formed in the placing frames, and the inserting grooves are communicated with the cabinet door. A plurality of placing racks are arranged on the cabinet body, a cover shell is arranged outside each placing rack, the cover shells are hinged in the cabinet body, vacuum heads are arranged at the cabinet body parts in the inner areas of the cover shells, the vacuum heads are externally connected with the same vacuum equipment, a circle of rubber sealing strip is arranged outside each placing rack, and the rubber sealing strips are attached to the inner walls of the cover shells. According to the utility model, the placing racks |
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