Lifting tray air filtering device for single crystal furnace

The utility model discloses a material hanging tray air filtering device for a single crystal furnace, which comprises an air inlet pipe, an air supply pipe, a first connecting flange, a second connecting flange and a filtering unit, one end of the air inlet pipe is an air inlet, the other end of th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI FEIJIAN, LU JIANHUA, JIA ZHIJUN, HONG HUA, GUAN SHUJUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a material hanging tray air filtering device for a single crystal furnace, which comprises an air inlet pipe, an air supply pipe, a first connecting flange, a second connecting flange and a filtering unit, one end of the air inlet pipe is an air inlet, the other end of the air inlet pipe is connected with the first connecting flange, and the other end of the air supply pipe is connected with the second connecting flange. One end of the air supply pipe is connected with the second connecting flange, the second connecting flange is further connected with the filter unit, the filter unit is located in a pipe cavity defined by the air inlet pipe and comprises a filter screen and a filter drying body, the filter drying body is placed in the filter screen, and the first connecting flange is connected with the second connecting flange. According to the utility model, particulate matters are filtered, moisture in gas is removed, impurities are prevented from being introduced into the cruci