Silicon wafer loading and unloading device

The utility model relates to a silicon wafer loading and unloading device, which comprises a supporting part, a wafer loading part and a wafer unloading part, the guide part is arranged on the supporting part, and the guide part can rotate relative to the supporting part; the jacking part is connect...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HU ZHENXIAN, WANG DONG, GUO JUNCHAO, LU QI, SHI LICHUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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