Silicon wafer loading and unloading device

The utility model relates to a silicon wafer loading and unloading device, which comprises a supporting part, a wafer loading part and a wafer unloading part, the guide part is arranged on the supporting part, and the guide part can rotate relative to the supporting part; the jacking part is connected to the supporting part in a sliding manner; the jacking part slides up and down relative to the supporting part through the guide part; the driving part is arranged on one side of the supporting part; the guiding part can rotate relative to the supporting part through the driving part. After the structure is adopted, the silicon wafer jacking mechanism has the beneficial effects that the ejector pin slides upwards through rotation of the guide part, so that a silicon wafer on the processing disc is jacked up, subsequent operation of the silicon wafer is facilitated, and the silicon wafer jacking mechanism is simple in overall structure, convenient to operate and high in practicability. 本实用新型是关于一种硅片的载卸片装置，其包括：支撑部