Outdoor fresh air temperature and humidity processing device for microelectronic laboratory
The utility model provides an outdoor fresh air temperature and humidity processing device of a microelectronic laboratory, which is formed by splicing a first outer shell, a second outer shell and a third outer shell, an air inlet chamber, a first filter chamber, a preheating chamber and a first su...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides an outdoor fresh air temperature and humidity processing device of a microelectronic laboratory, which is formed by splicing a first outer shell, a second outer shell and a third outer shell, an air inlet chamber, a first filter chamber, a preheating chamber and a first surface cooling chamber are sequentially arranged in the first outer shell along the air flowing direction, and a second filter chamber is arranged in the second outer shell along the air flowing direction. A humidifying chamber, a second surface cooling chamber and a reheating chamber are sequentially arranged in the second outer shell in the gas flowing direction, a humidifier is installed in the humidifying chamber, a fan chamber, an efficient filtering chamber and an air outlet chamber are sequentially arranged in the third outer shell in the gas flowing direction, an EC fan is installed in the fan chamber, and an air inlet is formed in the third outer shell. And a high-efficiency filter is mounted in the high-ef |
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