High-precision wafer reference edge processing equipment

The utility model discloses high-precision wafer reference edge processing equipment, which relates to the field of wafer processing equipment and comprises a base, a portal frame, a positioning plate, a grinding wheel component, a position adjusting mechanism, a height adjusting mechanism, a horizontal moving mechanism and a sample table. The positioning plate is installed at the top end of the position adjusting mechanism, the sample table is installed at the position, close to the working end of the positioning plate, of the base, the wafer is placed on the sample table, the portal frame is installed on the base, the horizontal moving mechanism is installed at the top of the portal frame, and the fixed end of the height adjusting mechanism is connected to a sliding plate of the horizontal moving mechanism. The grinding wheel assembly is installed at the sliding end of the height adjusting mechanism. According to the utility model, the integrated operation of wafer positioning and angle adjustment is realiz