Chemical mechanical polishing equipment

The utility model provides chemical mechanical grinding equipment, and relates to the technical field of chemical grinding. Chemical mechanical grinding equipment comprises a grinding box and a grinding mechanism installed in the grinding box, an arc-shaped plate is fixedly connected to the interior...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIANG XIAOFANG, HUANG XIAOTIAN, LI YEQING, AN ZILIANG, MA KUI, QIU SHIBIN, SU TENGYAN, CUI JINCHAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model provides chemical mechanical grinding equipment, and relates to the technical field of chemical grinding. Chemical mechanical grinding equipment comprises a grinding box and a grinding mechanism installed in the grinding box, an arc-shaped plate is fixedly connected to the interior of the grinding box, sieve holes are formed in the arc-shaped plate, the grinding mechanism comprises a movable frame arranged in the grinding box, a grinding roller is rotationally connected to the interior of the movable frame, and the movable frame is fixedly connected with the grinding box. And a scraping mechanism for scraping the grinding roller is arranged on the movable frame. Chemical substances to be ground are placed in the grinding box and fall on the arc-shaped plate, materials on the arc-shaped plate are ground through the grinding roller, the swinging mechanism drives the grinding roller to swing on the arc-shaped plate in a reciprocating mode, and the materials are repeatedly ground till the qualif