Supporting assembly for supporting substrate tray and epitaxial layer growth equipment
The utility model discloses a supporting assembly used for supporting a substrate tray and epitaxial layer growth equipment, and the supporting assembly used for supporting the substrate tray comprises a rotating shaft; one end of each support arm is connected with the top of the rotating shaft, and...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a supporting assembly used for supporting a substrate tray and epitaxial layer growth equipment, and the supporting assembly used for supporting the substrate tray comprises a rotating shaft; one end of each support arm is connected with the top of the rotating shaft, and the other end of each support arm is used for supporting a substrate tray; the light-transmitting disc is arranged at the top of the rotating shaft, is connected with each support arm and comprises a central area and a peripheral area surrounding the central area; the air guide part penetrates through the thickness of the central area of the light transmitting disc; when the temperature of the substrate tray is measured, a temperature measuring light beam penetrates through the peripheral area of the light transmitting disc and irradiates to the bottom of the substrate tray. According to the utility model, the light-transmitting disc is arranged on the rotating shaft, so that the temperature measurement light beam |
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