Photoresist drying device

The photoresist drying device comprises a drying box and a conveying belt, the upper portion of the conveying belt penetrates through the drying box, the bottom of the conveying belt is located at the bottom of the drying box, and a plurality of part containing grooves are formed in the conveying be...

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Bibliographische Detailangaben
1. Verfasser: LIANG YUNJIANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The photoresist drying device comprises a drying box and a conveying belt, the upper portion of the conveying belt penetrates through the drying box, the bottom of the conveying belt is located at the bottom of the drying box, and a plurality of part containing grooves are formed in the conveying belt at intervals. The drying device comprises a drying box, a conveying belt is arranged on the upper portion of the drying box, through openings allowing the conveying belt to go in and out are formed in the two sides of the drying box respectively, and movable drying lamp assemblies are arranged at the positions, located on the upper portion and the lower portion of the conveying belt, in the drying box respectively. And meanwhile, the height of the drying lamp assembly can be adjusted up and down, so that the drying lamp assembly can conduct drying better, lifting heat preservation doors are arranged on the two sides of the drying box, when the parts are dried, the drying box can be closed to a certain degree, an