Developing solution supply pipeline and developing equipment
The utility model relates to the technical field of semiconductor processing equipment, in particular to a developing solution supply pipeline and developing equipment. The developing solution supply pipeline comprises a developing solution supply pump, a pre-pumping supply pipeline and a post-pumpi...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to the technical field of semiconductor processing equipment, in particular to a developing solution supply pipeline and developing equipment. The developing solution supply pipeline comprises a developing solution supply pump, a pre-pumping supply pipeline and a post-pumping supply pipeline; the developing solution supply pump comprises a solution inlet end and a solution outlet end, the before-pump supply pipeline is connected with the solution inlet end, and the after-pump supply pipeline is connected with the solution outlet end; a metal regulator is arranged in the before-pump supply pipeline, and a metal pipeline connecting piece is arranged in the after-pump supply pipeline; and the metal regulator and the metal pipeline connecting piece are both connected with a grounding lead. The static electricity generated in the developing solution is conducted and removed in a segmented manner, so that the developing solution is prevented from carrying high static electricity, on one ha |
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