Substrate conveying mechanism, substrate transfer device and chip mass transfer equipment

The utility model discloses a substrate conveying mechanism, a substrate transfer device and chip mass transfer equipment, and relates to the technical field of conveying structures, the substrate conveying mechanism comprises a fixed support and a movable support, the movable support and the fixed support form a conveying channel, the middle part of the conveying channel is arranged in an up-and-down through manner, and the movable support is arranged in the middle of the conveying channel. The movable support can move back and forth in the direction close to and away from the fixed support, the first adjusting assembly is used for driving the movable support to be close to and away from the fixed support, and the conveying assembly is at least partially and movably arranged on the side, close to the conveying channel, of the fixed support and/or the movable support and can drive the base plate to move along the conveying channel. According to the substrate conveying mechanism, the conveying channel can be m