Auxiliary device for analyzing and detecting metal content of wafer

The utility model relates to the technical field of wafer detection, in particular to an auxiliary device for analyzing and detecting the metal content of a wafer. According to the technical scheme, the device comprises a vertical box, a side box and a second clamping roller, a two-way screw rod pen...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CAI XINCHUN, WEI SHENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The utility model relates to the technical field of wafer detection, in particular to an auxiliary device for analyzing and detecting the metal content of a wafer. According to the technical scheme, the device comprises a vertical box, a side box and a second clamping roller, a two-way screw rod penetrating through the vertical box is rotationally installed in the side box, two sets of screw sleeves are installed on the outer side of the two-way screw rod in a threaded mode, a clamping base is fixedly installed on the front face of one set of screw sleeves, and a pressure sensor is embedded in the clamping base; a connecting base is installed on one side of the clamping base through cooperation of a connecting rod and the connecting hole, and a first clamping roller is rotationally installed on the front face of the connecting base. The clamping force of the first clamping roller on the wafer body is monitored in real time through the pressure sensor, a monitoring electric signal is transmitted to the control